Daim Ntawv Thov ntawm Laser Micromachining Technology hauv Khoom Siv Khoom Siv Hluav Taws Xob
Daim Ntawv Thov Ob
Kev Tsim Tshuaj Kho Mob MEMS Cheebtsam
Micro-electromechanical system thev naus laus zis raws li nyob rau xyoo pua 21st tshuab raws li micron thiab nanotechnology. Txij li xyoo 1980, nws tau thov rau hauv kev lag luam kho mob, thiab nws cov thev naus laus zis thiab cov khoom lag luam tau raug npog hauv thaj chaw biomedicine xws li kuaj pom, kuaj pom, thiab kho mob. Tam sim no, MEMS kev siv thev naus laus zis yog cov thev naus laus zis los ua cov khoom siv silicon siv cov tshuaj etching lossis cov txheej txheem sib txuas ua ke. Txawm li cas los xij, vim muaj cov yam ntxwv ntawm kev kho mob MEMS ua cov khoom siv thiab kev siv tshuaj, muaj qhov sib txawv zoo thiab cov cuab yeej tshiab thiab cov khoom siv tshiab tau siv hauv kev kho mob. Nrog rau cov ntawv thov tas mus li ntawm cov teb, kev siv tshuaj silicon-based kev ua tsis tau thov rau kev ua tiav ntawm kev kho mob MEMS. Piv nrog cov tsoos ua ntej siv tshuab ua kua, laser micromachining technology tsis yog siv rau cov khoom siv ntau yam, tab sis kuj tuaj yeem ua tus txheej txheem 3D micro-qauv nrog sub-micron precision. Nws muaj cov ntawv thov zoo nyob rau hauv kev tsim cov tshuaj MEMS.
Kev siv ntawm high-density microelectrode arrays mus deev los yog cov ntaub neural kev ua si yog ib tug heev thiab tseem ceeb kev tshawb fawb cov ntsiab lus nyob rau hauv lub teb ntawm neural prostheses. Ntsuab li al. fabricated portable high-density microelectrode array siv femtosecond laser microfabrication thev naus laus zis siv cov ntaub ntawv zoo li PDMS thiab platinum (Pt) cov ntawv ci. Cov kev tshwm sim qhia tias lub saum npoo qauv ntawm cov microelectrode array ua los ntawm cov laser micromachining txoj kev yog uniform thiab roughness. Zoo dua, qhov siab tshaj plaws electrode chaw cov tuab hauv cov kab teeb yog txog 200 μm.
Aluminium nitride (AlN) cov ntaub ntawv muaj cov tshuab tsis tshua muaj siab hauv kev lom neeg thiab muaj kev tsim rau cov khoom siv biocompatible. Siv sapphire ua cov khoom siv hauv paus, ib qho qauv nthwv dej sib xyaw ua ke yog qhov chaw ntawm AlN zaj duab xis thiab tuaj yeem ua ke nrog microfluidic system rau kev xa tshuaj. Safadi li al. siv excimer laser micromachining mus fabricate ib waveguide qauv rau ib tug sapphire-raws li AlN zaj duab xis. Cov qauv no ua ke nrog microfluidics tuaj yeem ua lub luag haujlwm tseem ceeb hauv kev xa tshuaj hauv cov nqaij ntshiv.
Tsawg kawg tus phais cov cuab yeej ua si ib qho tseem ceeb luag hauj lwm nyob rau hauv biomedical mob thiab kev kho mob, thiab catheters yog muab kev koom tes nyob rau hauv ntau tsawg kawg tus phais cov cuab yeej. Piv rau pa passive catheters, active tswj ntawm tipped catheters enables ntau dua precision thiab efficiency. Lee li al. npaj ib polypyrrole (PPy) -Zaj no muaj nyob dag nqaij uas tau tsav catheter los ntawm laser micromachining technology thiab pom hais tias nws lub controllability ntawm lub npaj plaub-electrode catheter los ntawm ob-dimensional dabtsi yog khoov tsab ntawv tsa suab, raws li qhia nyob rau hauv daim duab. Lub ua ke ntawm ib tug active catheter ua los ntawm micromachining thiab kho qhov muag coherence tomography enables visualization ntawm lub subsurface ntawm lom ntaub so ntswg, lees tias tus superior imaging tuition ntawm kev siv no cov yam ntxwv tsim.
Daim duab PPy-based active catheter npaj los ntawm laser micromachining. (A) Plaub-electrode catheter tsim qauv; (B) Plaub-electrode catheter SEM duab uas npaj los ntawm laser micromachining; (c) PPy dabtsi yog khoov suab ntawm ib qho kawg ntawm cov raj yas
Silicon wafers kheev siv biomaterials los npaj biomaterials. Wongwiwat li al. kawm los ntawm cov micro-channel array lug thiab square lug ua rau ntawm qhov chaw ntawm silicon wafers siv laser micromachining technology nyob rau lom yam ntxwv ntawm silicon wafers, cim tias seb thaum uas cov micro-qauv ntawm cov pob zeb ntais wafer nto yuav ua tau kom protein haum. Txawm hais tias qhov no yuav ua rau lub plawv plawv lossis ntshav ntsig txog kev kho mob los tsim cov tshuaj thrombi thaum thov, txhim kho cov protein ntau tseem tuaj yeem txhawb lub zog ntawm tes. Qhov no siv rau biomedical implanted MEMS pab kiag li lawm xws li Microchips, siab sensors, thiab tshuaj tus me nyuam lub nruab. Daim ntawv thov yog qhov zoo heev.
Qhov teeb meem ntawm qhov kev npaj ntawm 3D-zoo li tus micro / nano fiber lug yeej ib txwm tau ib tug teeb meem uas tsis tau zoo thov nyob rau hauv lub teb ntawm cov ntaub so ntswg engineering. Kim li al. siv femtosecond laser ua technology ua 3D pore lug rau 3D micro / nano fiber lug ua los ntawm electrospinning.
Peripheral paj lwm lub caij yog ib tug multi-txheej polymer qauv ua los ntawm biomaterials xws li poly-D-lactic acid (PDLA) thiab polyvinyl cawv (PVA). Lub PDLA zaj duab xis yog degradable nyob rau hauv 4-6 lub hlis, thiab cov PVA zaj duab xis yog Dissolve nyob rau hauv ob lub lis piam nyob hauv 37 ° C. Cov txiaj ntsig ntawm Kancharla et al' s xyoo 2002 cov kev sim pom tau hais tias laser micromachining thev naus laus zis yog qhov ua tau rau kev npaj ntawm biodegradable micro-kho mob.
Qhov kev ntsuas miniaturization ntawm biomedical yam, tshwj xeeb tshaj yog kev hloov ntawm biomicrodevices mus rau biomaterials, yog qhov nyuaj rau cov kws tshawb nrhiav. Nyob rau hauv lub cheeb tsam ntawm kev txhim kho ntawm kev kho mob pab kiag li lawm, kev tiv thaiv, mob thiab kev kho mob ntawm cov kab mob, MEMS muaj tej zaum daim ntawv sau npe. Miniaturization yog qhov tseem ceeb ntawm MEMS. Nrog kev txhim kho tsis tu ncua ntawm MEMS thev naus laus zis hauv biomedical teb, yuav ua li cas kom sai thiab ua cov txheej txheem nce ntxiv kom yooj yim thiab ncaj qha tau dhau los ua qhov teeb meem tseem ceeb rau MEMS kev tsim kho hauv biomedical field.
Laser micromachining thev naus laus zis ua rau nws tsis tuaj yeem ua rau txoj kev siv tshuaj micromachining kom paub cov khoom kho mob me me xws li kho mob kho mob, kho me me, thiab cov tshuab xa tawm tshuaj. Txawm hais tias daim ntawv thov ntawm laser micromachining technology nyob rau hauv biomedical MEMS tau cia li pib, tab sis qhov ncaj laser micromachining thiab laser stereolithography raws li nyob rau hauv lub laser ablation mechanism tau txais ntau thiab ntau xim thiab kev tshawb fawb, laser micromachining technology yog ua txhua yam rau Txhawb lub dav daim ntawv thov ntawm MEMS nyob rau hauv biomedical thiab txhawb txoj kev loj hlob ntawm niaj hnub kho mob engineering.